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In the TEM,
the electron beam passes through a very thin sample. Typically the
electron beam accelerating voltages are much higher than in a Scanning
Electron Microscope (SEM) and the x-ray yield can be much lower.
The environment
requires very high vacuum and ultra-clean conditions. When operating
the TEM in low magnification mode, the electron beam can easily
come into contact with a supporting grid bar which results in a
sudden dramatic increase in x-ray intensity together with scattered
high energy electrons, neither of which are very kind to EDX detectors.
e2v scientific instruments 'Sirius'
Si(Li) TEM detectors overcome these conditions with the following
features:
30mm² or 50mm² Si(Li) crystals for improved solid angle.
Angled crystal designs for high take off angle.
High vacuum bellows for vacuum integrity.
Automatic motorised retraction mechanism to protect the detector
from high x-ray and scattered electron fluxes.
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